JPS5920065U - 真空弁 - Google Patents

真空弁

Info

Publication number
JPS5920065U
JPS5920065U JP11348082U JP11348082U JPS5920065U JP S5920065 U JPS5920065 U JP S5920065U JP 11348082 U JP11348082 U JP 11348082U JP 11348082 U JP11348082 U JP 11348082U JP S5920065 U JPS5920065 U JP S5920065U
Authority
JP
Japan
Prior art keywords
vacuum valve
valve
utility
model registration
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11348082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336212Y2 (en]
Inventor
今野 一男
杉沢 敬助
滋 山口
Original Assignee
大亜真空技研株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 大亜真空技研株式会社 filed Critical 大亜真空技研株式会社
Priority to JP11348082U priority Critical patent/JPS5920065U/ja
Publication of JPS5920065U publication Critical patent/JPS5920065U/ja
Application granted granted Critical
Publication of JPS6336212Y2 publication Critical patent/JPS6336212Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lift Valve (AREA)
JP11348082U 1982-07-28 1982-07-28 真空弁 Granted JPS5920065U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11348082U JPS5920065U (ja) 1982-07-28 1982-07-28 真空弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11348082U JPS5920065U (ja) 1982-07-28 1982-07-28 真空弁

Publications (2)

Publication Number Publication Date
JPS5920065U true JPS5920065U (ja) 1984-02-07
JPS6336212Y2 JPS6336212Y2 (en]) 1988-09-26

Family

ID=30262676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11348082U Granted JPS5920065U (ja) 1982-07-28 1982-07-28 真空弁

Country Status (1)

Country Link
JP (1) JPS5920065U (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372220U (en]) * 1976-11-18 1978-06-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372220U (en]) * 1976-11-18 1978-06-16

Also Published As

Publication number Publication date
JPS6336212Y2 (en]) 1988-09-26

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